Bion Price list UCI User (Internal users)
| USAGE RATES AND FEES | MINIMUM TIME (Hours) | RATE |
|---|---|---|
| User One-Time Fee | $500 | |
| Clean Room Usage (Hourly Fee) | $38 (Monthly cap: $1,520) | |
| Staff Time | $125 | |
| Key Fee (One-time) | $15 | |
EQUIPMENT RATES | ||
| Hazardous Waste Disposal (cost varies) | ||
Depositions Tools | ||
| CHA Mark 50 Evaporation (superuser tool) | 1.5 | $25 hr |
| E-Beam 1 Evaporation (Temescal CV-8) | 3 | $15 hr |
| E-Beam 2 Evaporation (Temescal CV-14) (superuser tool) | 3 | $15 hr |
| CHA Thermal Evaporation (SEC-600-RAP) | 3 | $20 hr |
| PE 4400 Sputtering (superuser tool) | 3 | $15 hr |
| PE 2400-A Sputtering (superuser tool) | 3 | $15 hr |
| PE 2400-B Sputtering (superuser tool) | 3 | $15 hr |
| Electric Plating | no charge | |
| ALD Atomic Layer Deposition Cambridge | No Minimum | $15 hr |
| Applied MST MVD 100 | .5 | $20 hr |
Lithography Tools | ||
| Canon i4 4000 Stepper (superuser tool) | .25 | $150 hr |
| E-Beam Lithography (superuser tool) | .25 | $125 hr |
| Karl Suss MA6 Mask Aligner | .50 | $30 hr |
| Karl Suss MA56 Mask Aligner | .50 | $30 hr |
| Karl Suss MJB-3 Mask Aligner | .50 | $20 hr |
| Kasper Mask Aligner model 3001 | .50 | $20 hr |
| Quintel Mask Aligner | .50 | $20 hr |
| UV Flood Exposure System | .25 | $15 hr |
| Solitec Spinner Model 5110-CT | No Minimum | $10 hr |
| Solitec Spinner Model 5110-ND | No Minimum | $10 hr |
| Solitec Spinner Model 5110-C-TD | No Minimum | $10 hr |
| Laurell Spinner #1 | No Minimum | $10 hr |
| Laurell Spinner #2 | No Minimum | $10 hr |
| Laurell Spinner #3 | No Minimum | $10 hr |
| Headway Spinner #1 | No Minimum | $10 hr |
| Headway Spinner #2 | No Minimum | $10 hr |
Dry Etching | ||
| STS System DRIE | .5 | $40 hr |
| SPTS DRIE | .5 | $40 hr |
| Plasma-Therm RIE Model 780 | .5 | $35 hr |
| Trion ICP/RIE | .5 | $25 hr |
| Ion Milling | 3 | $15 hr |
| XeF2 Pulsing Etcher | .5 | $25 hr |
| Plasma Technology Model 800MP RIE | .5 | $35 hr |
| Plasma Technology Model DP800 UP | .5 | $30 hr |
| Laser Ablation Tool Resonetics RAPIDX250 | .5 | $45 hr |
Plasma-Asher | ||
| Gasonics Downstream Plasma Ashing | .25 | $20 hr |
| Technics II 500 | .25 | $15 hr |
| Plasma line asher | .25 | $15 hr |
| Anatech LTD Plasma SP100 | .25 | $15 hr |
Hot Embossing | ||
| Nano Imprinter Jenoptik HEX03 | .50 | $40 hr |
CVD System | ||
| Plasma Therm PECVD | 1 | $20 hr |
| BMR Low Temp PECVD (superuser tool) | .5 | $20 hr |
| Anicon LTO CVD (superuser tool) | 3 | $20 hr |
| ASM LPCVD low-stress nitride, poly (superuser tool) | 1 | no charge |
| First Nano Furnace | No Minimum | $40 hr |
Diffusion Furnaces | ||
| 6-inch Dry and Wet Oxidation Tube (superuser tool) | 1 | $10 hr |
| 4-inch Dry Oxidation Tube | 1 | $10 hr |
| 4-inch Long Anneal Tube | 1 | $10 hr |
| 4-inch Sintering Tube | 1 | $10 hr |
| 4-inch Boron Tube (superuser tool) | 1 | $15 hr |
| 2-inch Nano Furnace Tube (superuser tool) | 1 | $10 hr |
| 6-inch Mini-brute Thermal Bonding Tube | 1 | $10 hr |
| 4-inch Mini-brute Tube | 1 | $10 hr |
| Heatpulse 610 RTA | 1 | $20 hr |
| Anodic Bonding Furnace up to 4 inch (superuser tool) | 1 | $5 hr |
Characterization | ||
| SEM Hitacht 4700/EDAX | .5 | $40 hr |
| HS200 Confocal Microscope/Profiler (superuser tool) | .25 | $20 hr |
| Dektak3 Profilometer | No Minimum | $15 hr |
| DektakXT | No Minimum | $15 hr |
| Tencor FLX-2320A Stress Measurement Tool | No Minimum | no charge |
| Nanospec AFT/Nanometrics 200 | No Minimum | no charge |
| Gaertner Ellipsometer (superuser tool) | No Minimum | no charge |
| Tousimis 815C CPD (superuser tool) | 1 | $25 hr |
| Nano CT | 1 | $45 hr |
| AFM | 1 | $15 hr |
Back End Processing Tools | ||
| Dicing Saw (superuser tool) | 1 | $20 hr |
| K&S Wedge Bonder | .5 | $20 hr |
| K&S Gold Ball Bonder | .5 | $20 hr |
| Hybrid Ball Bonder | .5 | $20 hr |
| Cincinnati Sub-Zero Environmental Chamber | 1 | $10 hr |
| Tenney Environmental Chamber | 1 | $10 hr |
| Inert Environment Blue M Oven 600 Degrees | 1 | $5 hr |
| HDMS Oven | 1 | $5 hr |
